Granted Patent
Utility
US 4,276,114 · App. 06/009,967
Semiconductor substrate and a manufacturing method thereof
Inventors:
Yukio Takano, Masahiko Ogirima, Shigeru Aoki, Michiyoshi Maki, Shigeo Kato
Patented Case
View Patent ↗
Granted: Jun 30, 1981
Filed: Feb 6, 1979
Inventors
Yukio Takano
Masahiko Ogirima
Shigeru Aoki
Michiyoshi Maki
Shigeo Kato
Assignee (at issue)
HITACHI, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.