Granted Patent
Utility
US 4,278,366 · App. 05/779,074
Automatic wafer processing system and method
Inventors:
W. L. Loveless, Richard Trott, Robert Harry Heath, William L. Glick
Patented Case
View Patent ↗
Granted: Jul 14, 1981
Filed: Mar 18, 1977
Inventors
W. L. Loveless
Richard Trott
Robert Harry Heath
William L. Glick
Assignee (at issue)
GCA Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.