Granted Patent
Utility
US 4,283,260 · App. 06/035,363
Method and system for regulating the discharge process in a cathode sputtering apparatus
Inventors:
Friedrich-Werner Thomas, Konrad Priess
Patented Case
View Patent ↗
Granted: Aug 11, 1981
Filed: May 2, 1979
Inventors
Friedrich-Werner Thomas
Konrad Priess
Assignee (at issue)
Leybold-Heraeus GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.