Granted Patent
Utility
US 4,283,483 · App. 06/059,010
Process for forming semiconductor devices using electron-sensitive resist patterns with controlled line profiles
Inventor:
Philip J. Coane
Patented Case
View Patent ↗
Granted: Aug 11, 1981
Filed: Jul 19, 1979
Inventor
Philip J. Coane
Assignee (at issue)
Hughes Aircraft Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.