Granted Patent
Utility
US 4,284,033 · App. 06/089,858
Means to orbit and rotate target wafers supported on planet member
Inventor:
Eddy H. del Rio
Patented Case
View Patent ↗
Granted: Aug 18, 1981
Filed: Oct 31, 1979
Inventor
Eddy H. del Rio
Assignee (at issue)
RCA Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.