Granted Patent
Utility
US 4,286,049 · App. 06/054,430
Method of forming a negative resist pattern
Inventors:
Saburo Imamura, Shungo Sugawara, Hirotsugu Sato
Patented Case
View Patent ↗
Granted: Aug 25, 1981
Filed: Jul 3, 1979
Inventors
Saburo Imamura
Shungo Sugawara
Hirotsugu Sato
Assignee (at issue)
Nippon Telegraph and Telephone Public Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.