Granted Patent
Utility
US 4,286,050 · App. 06/171,050
Method of exposing and developing a homopolymer resist
Inventors:
Richard Joseph Himics, Michael Kaplan, Nitin V. Desai
Patented Case
View Patent ↗
Granted: Aug 25, 1981
Filed: Jul 22, 1980
Inventors
Richard Joseph Himics
Michael Kaplan
Nitin V. Desai
Assignee (at issue)
RCA Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.