Granted Patent
Utility
US 4,286,154 · App. 06/097,125
Method of detecting a mark by an electron beam and an apparatus therefor
Inventors:
Tsuneo Okubo, Nobuo Hamamoto, Kazuo Ichino
Patented Case
View Patent ↗
Granted: Aug 25, 1981
Filed: Nov 26, 1979
Inventors
Tsuneo Okubo
Nobuo Hamamoto
Kazuo Ichino
Assignees (at issue)
HITACHI, LTD.
Nippon Telegraph and Telephone Public Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.