Granted Patent
Utility
US 4,286,541 · App. 06/060,973
Applying photoresist onto silicon wafers
Inventor:
Robert S. Blackwood
Patented Case
View Patent ↗
Granted: Sep 1, 1981
Filed: Jul 26, 1979
Inventor
Robert S. Blackwood
Assignee (at issue)
FSI HOLDINGS, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.