Granted Patent
Utility
US 4,287,224 · App. 06/065,013
Method for regulating the evaporation rate of oxidizable substances in reactive vacuum deposition
Inventors:
Klaus-Jurgen Heimbach, Walter Zultzke
Patented Case
View Patent ↗
Granted: Sep 1, 1981
Filed: Aug 9, 1979
Inventors
Klaus-Jurgen Heimbach
Walter Zultzke
Assignee (at issue)
Leybold-Heraeus GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.