Granted Patent
Utility
US 4,303,341 · App. 06/101,166
Optically testing the lateral dimensions of a pattern
Inventors:
Hans P. Kleinknecht, Wolfram A. Bosenberg
Patented Case
View Patent ↗
Granted: Dec 1, 1981
Filed: Dec 7, 1979
Inventors
Hans P. Kleinknecht
Wolfram A. Bosenberg
Assignee (at issue)
RCA Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.