Granted Patent
Utility
US 4,304,983 · App. 06/163,148
Plasma etching device and process
Inventor:
Alfred J. Pierfederici
Patented Case
View Patent ↗
Granted: Dec 8, 1981
Filed: Jun 26, 1980
Inventor
Alfred J. Pierfederici
Assignee (at issue)
RCA Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.