Granted Patent
Utility
US 4,313,266 · App. 06/145,867
Method and apparatus for drying wafers
Inventor:
Johann Tam
Patented Case
View Patent ↗
Granted: Feb 2, 1982
Filed: May 1, 1980
Inventor
Johann Tam
Assignee (at issue)
Silicon Valley Group, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.