Granted Patent
Utility
US 4,313,284 · App. 06/134,714
Apparatus for improving flatness of polished wafers
Inventor:
Robert J. Walsh
Patented Case
View Patent ↗
Granted: Feb 2, 1982
Filed: Mar 27, 1980
Inventor
Robert J. Walsh
Assignee (at issue)
Monsanto Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.