Granted Patent
Utility
US 4,315,705 · App. 05/779,075
Apparatus for handling and treating wafers
Inventor:
Alan G. Flint
Patented Case
View Patent ↗
Granted: Feb 16, 1982
Filed: Mar 18, 1977
Inventor
Alan G. Flint
Assignee (at issue)
GCA Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.