Granted Patent
Utility
US 4,333,814 · App. 06/107,223
Methods and apparatus for improving an RF excited reactive gas plasma
Inventor:
Birol Kuyel
Patented Case
View Patent ↗
Granted: Jun 8, 1982
Filed: Dec 26, 1979
Inventor
Birol Kuyel
Assignee (at issue)
Western Electric Company, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.