Granted Patent
Utility
US 4,336,597 · App. 06/163,295
Method and system for measuring the diameter of an electron beam
Inventors:
Tsuneo Okubo, Yasuo Kato, Genya Matsuoka
Patented Case
View Patent ↗
Granted: Jun 22, 1982
Filed: Jun 26, 1980
Inventors
Tsuneo Okubo
Yasuo Kato
Genya Matsuoka
Assignees (at issue)
Nippon Telegraph and Telephone Public Corporation
HITACHI, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.