IP Library Granted Patent US 4,339,869
Granted Patent Utility
US 4,339,869 · App. 06/187,043

Method of making low resistance contacts in semiconductor devices by ion induced silicides

Inventors: Robert F. Reihl, Kang L. Wang
Patented Case View Patent ↗
Granted: Jul 20, 1982 Filed: Sep 15, 1980
Inventors
Robert F. Reihl
Kang L. Wang
Assignee (at issue)
General Electric Company

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Quick Facts
Patent No.
US 4,339,869
App. No.
06/187,043
Filed
1980-09-15
Granted
1982-07-20
Kind
A