IP Library Granted Patent US 4,340,306
Granted Patent Utility
US 4,340,306 · App. 06/117,855

Optical system for surface topography measurement

Inventor: N. Balasubramanian
Patented Case View Patent ↗
Granted: Jul 20, 1982 Filed: Feb 4, 1980
Inventor
N. Balasubramanian

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Quick Facts
Patent No.
US 4,340,306
App. No.
06/117,855
Filed
1980-02-04
Granted
1982-07-20
Kind
A