IP Library Granted Patent US 4,341,749
Granted Patent Utility
US 4,341,749 · App. 06/292,426

Heating method for silane pyrolysis reactor

Inventors: Sridhar K. Iya, Richard A. Van Slooten, Mark Edward Braaten, James R. Lay
Patented Case View Patent ↗
Granted: Jul 27, 1982 Filed: Aug 14, 1981
Inventors
Sridhar K. Iya
Richard A. Van Slooten
Mark Edward Braaten
James R. Lay
Assignee (at issue)
Union Carbide Corporation

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Quick Facts
Patent No.
US 4,341,749
App. No.
06/292,426
Filed
1981-08-14
Granted
1982-07-27
Kind
A