IP Library Granted Patent US 4,342,949
Granted Patent Utility
US 4,342,949 · App. 06/093,008

Charged particle beam structure having electrostatic coarse and fine double deflection system with dynamic focus and diverging beam

Inventors: Kenneth J. Harte, Edward C. Dougherty
Patented Case View Patent ↗
Granted: Aug 3, 1982 Filed: Nov 9, 1979
Inventors
Kenneth J. Harte
Edward C. Dougherty
Assignee (at issue)
Control Data Corporation

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Quick Facts
Patent No.
US 4,342,949
App. No.
06/093,008
Filed
1979-11-09
Granted
1982-08-03
Kind
A