IP Library Granted Patent US 4,345,968
Granted Patent Utility
US 4,345,968 · App. 06/296,754

End point detection using gas flow

Inventor: Mary Ellen B. Coe
Patented Case View Patent ↗
Granted: Aug 24, 1982 Filed: Aug 27, 1981
Inventor
Mary Ellen B. Coe
Assignee (at issue)
NCR Corporation

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Quick Facts
Patent No.
US 4,345,968
App. No.
06/296,754
Filed
1981-08-27
Granted
1982-08-24
Kind
A