IP Library Granted Patent US 4,346,301
Granted Patent Utility
US 4,346,301 · App. 06/245,285

Ion implantation system

Inventors: William P. Robinson, Robert L. Seliger
Patented Case View Patent ↗
Granted: Aug 24, 1982 Filed: Mar 19, 1981
Inventors
William P. Robinson
Robert L. Seliger
Assignee (at issue)
Hughes Aircraft Company

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Quick Facts
Patent No.
US 4,346,301
App. No.
06/245,285
Filed
1981-03-19
Granted
1982-08-24
Kind
A