Granted Patent
Utility
US 4,349,621 · App. 06/253,985
Process for X-ray microlithography using thin film eutectic masks
Inventor:
Harvey E. Cline
Patented Case
View Patent ↗
Granted: Sep 14, 1982
Filed: Apr 13, 1981
Inventor
Harvey E. Cline
Assignee (at issue)
General Electric Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.