Granted Patent
Utility
US 4,351,892 · App. 06/260,514
Alignment target for electron-beam write system
Inventor:
T. Grant Davis
Patented Case
View Patent ↗
Granted: Sep 28, 1982
Filed: May 4, 1981
Inventor
T. Grant Davis
Assignee (at issue)
Fairchild Camera & Instrument Corp.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.