Granted Patent
Utility
US 4,352,016 · App. 06/189,348
Method and apparatus for determining the quality of a semiconductor surface
Inventors:
Michael Duffy, Peter John Zanzucchi
Patented Case
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Granted: Sep 28, 1982
Filed: Sep 22, 1980
Inventors
Michael Duffy
Peter John Zanzucchi
Assignee (at issue)
RCA Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.