Granted Patent
Utility
US 4,352,017 · App. 06/189,356
Apparatus for determining the quality of a semiconductor surface
Inventors:
Michael Duffy, John F. Corboy, Jr., Peter John Zanzucchi
Patented Case
View Patent ↗
Granted: Sep 28, 1982
Filed: Sep 22, 1980
Inventors
Michael Duffy
John F. Corboy, Jr.
Peter John Zanzucchi
Assignee (at issue)
RCA Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.