Granted Patent
Utility
US 4,352,607 · App. 06/215,499
Automatic wafer processing system and method
Inventors:
W. L. Loveless, Richard Trott, Robert Harry Heath, William L. Glick
Patented Case
View Patent ↗
Granted: Oct 5, 1982
Filed: Dec 11, 1980
Inventors
W. L. Loveless
Richard Trott
Robert Harry Heath
William L. Glick
Assignee (at issue)
GCA Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.