Granted Patent
Utility
US 4,353,159 · App. 06/262,620
Method of forming self-aligned contact in semiconductor devices
Inventor:
Sheng Teng Hsu
Patented Case
View Patent ↗
Granted: Oct 12, 1982
Filed: May 11, 1981
Inventor
Sheng Teng Hsu
Assignee (at issue)
RCA Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.