Granted Patent
Utility
US 4,355,094 · App. 06/244,104
Positive radiation sensitive resist terpolymers
Inventors:
Thomas R. Pampalone, Kurt B. Kilichowski
Patented Case
View Patent ↗
Granted: Oct 19, 1982
Filed: Mar 16, 1981
Inventors
Thomas R. Pampalone
Kurt B. Kilichowski
Assignee (at issue)
RCA Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.