Granted Patent
Utility
US 4,358,338 · App. 06/150,533
End point detection method for physical etching process
Inventors:
Daniel F. Downey, George T. Lecouras
Patented Case
View Patent ↗
Granted: Nov 9, 1982
Filed: May 16, 1980
Inventors
Daniel F. Downey
George T. Lecouras
Assignee (at issue)
Varian, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.