Granted Patent
Utility
US 4,369,031 · App. 06/302,003
Gas control system for chemical vapor deposition system
Inventors:
Jon C. Goldman, Robert E. Rappaport
Patented Case
View Patent ↗
Granted: Jan 18, 1983
Filed: Sep 15, 1981
Inventors
Jon C. Goldman
Robert E. Rappaport
Assignee (at issue)
Thermco Products, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.