Granted Patent
Utility
US 4,372,807 · App. 06/362,041
Plasma etching of aluminum
Inventors:
John L. Vossen, Jr., Bernard Halon
Patented Case
View Patent ↗
Granted: Feb 8, 1983
Filed: Mar 25, 1982
Inventors
John L. Vossen, Jr.
Bernard Halon
Assignee (at issue)
RCA Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.