Granted Patent
Utility
US 4,374,722 · App. 06/290,425
Cathodic sputtering target including means for detecting target piercing
Inventor:
Bogdan Zega
Patented Case
View Patent ↗
Granted: Feb 22, 1983
Filed: Aug 6, 1981
Inventor
Bogdan Zega
Assignee (at issue)
Battelle Development Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.