Granted Patent
Utility
US 4,375,398 · App. 06/381,287
Electron beam sensitive resist of an anhydride copolymer
Inventors:
Donald H. Lorenz, Earl P. Williams
Patented Case
View Patent ↗
Granted: Mar 1, 1983
Filed: May 24, 1982
Inventors
Donald H. Lorenz
Earl P. Williams
Assignee (at issue)
GAF Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.