Granted Patent
Utility
US 4,376,796 · App. 06/315,572
Processing silicon wafers employing processing gas atmospheres of similar molecular weight
Inventors:
Robert D. Arrasmith, Thomas R. Barnhart, Jon C. Goldman
Patented Case
View Patent ↗
Granted: Mar 15, 1983
Filed: Oct 27, 1981
Inventors
Robert D. Arrasmith
Thomas R. Barnhart
Jon C. Goldman
Assignee (at issue)
Thermco Products, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.