IP Library Granted Patent US 4,378,482
Granted Patent Utility
US 4,378,482 · App. 06/257,824

Electron-beam stage X-Y positioning instrumentation

Inventor: Theodore W. Tucker
Patented Case View Patent ↗
Granted: Mar 29, 1983 Filed: Apr 27, 1981
Inventor
Theodore W. Tucker
Assignee (at issue)
Control Data Corporation

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Quick Facts
Patent No.
US 4,378,482
App. No.
06/257,824
Filed
1981-04-27
Granted
1983-03-29
Kind
A