Granted Patent
Utility
US 4,378,628 · App. 06/296,914
Cobalt silicide metallization for semiconductor integrated circuits
Inventors:
Hyman J. Levinstein, Shyam P. Murarka, Ashok Sinha
Patented Case
View Patent ↗
Granted: Apr 5, 1983
Filed: Aug 27, 1981
Inventors
Hyman J. Levinstein
Shyam P. Murarka
Ashok Sinha
Assignee (at issue)
Bell Telephone Laboratories, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.