IP Library › Granted Patent US 4,380,490
Granted Patent Utility
US 4,380,490 · App. 06/248,549

Method of preparing semiconductor surfaces

Inventors: David E. Aspnes, Ambrose A. Studna
Patented Case View Patent ↗
Granted: Apr 19, 1983 Filed: Mar 27, 1981
Inventors
David E. Aspnes
Ambrose A. Studna
Assignee (at issue)
Bell Telephone Laboratories, Inc.

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Quick Facts
Patent No.
US 4,380,490
App. No.
06/248,549
Filed
1981-03-27
Granted
1983-04-19
Kind
A