Granted Patent
Utility
US 4,387,013 · App. 06/295,513
Reactive sputter etching of aluminum
Inventors:
Hans W. Lehmann, Klaus Frick, Roland Widmer
Patented Case
View Patent ↗
Granted: Jun 7, 1983
Filed: Aug 24, 1981
Inventors
Hans W. Lehmann
Klaus Frick
Roland Widmer
Assignee (at issue)
RCA Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.