Granted Patent
Utility
US 4,388,728 · App. 05/962,446
Soft X-ray lithography system
Inventor:
Saurabh D. Emmanuel
Patented Case
View Patent ↗
Granted: Jun 14, 1983
Filed: Nov 20, 1978
Inventor
Saurabh D. Emmanuel
Assignee (at issue)
The Machlett Laboratories, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.