Granted Patent
Utility
US 4,389,970 · App. 06/244,389
Apparatus for regulating substrate temperature in a continuous plasma deposition process
Inventor:
Robert F. Edgerton
Patented Case
View Patent ↗
Granted: Jun 28, 1983
Filed: Mar 16, 1981
Inventor
Robert F. Edgerton
Assignee (at issue)
Energy Conversion Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.