Granted Patent
Utility
US 4,390,789 · App. 06/266,074
Electron beam array lithography system employing multiple parallel array optics channels and method of operation
Inventors:
Donald O. Smith, Kenneth J. Harte
Patented Case
View Patent ↗
Granted: Jun 28, 1983
Filed: May 21, 1981
Inventors
Donald O. Smith
Kenneth J. Harte
Assignee (at issue)
Control Data Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.