IP Library Granted Patent US 4,394,236
Granted Patent Utility
US 4,394,236 · App. 06/348,804

Magnetron cathode sputtering apparatus

Inventor: Merrill G. Robinson
Patented Case View Patent ↗
Granted: Jul 19, 1983 Filed: Feb 16, 1982
Inventor
Merrill G. Robinson
Assignee (at issue)
Shatterproof Glass Corp.

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Quick Facts
Patent No.
US 4,394,236
App. No.
06/348,804
Filed
1982-02-16
Granted
1983-07-19
Kind
A