Granted Patent
Utility
US 4,396,705 · App. 06/303,400
Pattern forming method and pattern forming apparatus using exposures in a liquid
Inventors:
Masamoto Akeyama, Yoshifumi Tomita, Saburo Nonogaki
Patented Case
View Patent ↗
Granted: Aug 2, 1983
Filed: Sep 18, 1981
Inventors
Masamoto Akeyama
Yoshifumi Tomita
Saburo Nonogaki
Assignee (at issue)
HITACHI, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.