Granted Patent
Utility
US 4,397,938 · App. 06/330,492
Method of forming resist patterns using X-rays or electron beam
Inventors:
Nitin V. Desai, Emil J. Gavalchin
Patented Case
View Patent ↗
Granted: Aug 9, 1983
Filed: Dec 14, 1981
Inventors
Nitin V. Desai
Emil J. Gavalchin
Assignee (at issue)
RCA Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.