IP Library Granted Patent US 4,397,939
Granted Patent Utility
US 4,397,939 · App. 06/330,579

Method of using a positive electron beam resist medium

Inventor: Kurt B. Kilichowski
Patented Case View Patent ↗
Granted: Aug 9, 1983 Filed: Dec 14, 1981
Inventor
Kurt B. Kilichowski
Assignee (at issue)
RCA Corporation

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Quick Facts
Patent No.
US 4,397,939
App. No.
06/330,579
Filed
1981-12-14
Granted
1983-08-09
Kind
A