Granted Patent
Utility
US 4,401,054 · App. 06/257,616
Plasma deposition apparatus
Inventors:
Seitaro Matsuo, Hideo Yoshihara, Shinichi Yamazaki
Patented Case
View Patent ↗
Granted: Aug 30, 1983
Filed: Apr 27, 1981
Inventors
Seitaro Matsuo
Hideo Yoshihara
Shinichi Yamazaki
Assignee (at issue)
Nippon Telegraph and Telephone Public Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.