Granted Patent
Utility
US 4,401,131 · App. 06/264,097
Apparatus for cleaning semiconductor wafers
Inventor:
Robert M. Lawson
Patented Case
View Patent ↗
Granted: Aug 30, 1983
Filed: May 15, 1981
Inventor
Robert M. Lawson
Assignee (at issue)
GCA Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.