Granted Patent
Utility
US 4,401,507 · App. 06/398,066
Method and apparatus for achieving spatially uniform externally excited non-thermal chemical reactions
Inventor:
George Engle
Patented Case
View Patent ↗
Granted: Aug 30, 1983
Filed: Jul 14, 1982
Inventor
George Engle
Assignee (at issue)
Advanced Semiconductor Materials America, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.